发明名称 Liquid processing apparatus
摘要 Disclosed is a liquid processing apparatus that includes: a rotational unit configured to rotate a substrate to be processed while the substrate is being held horizontally; and a processing liquid supplying unit configured to supply a processing liquid to the bottom surface of the substrate to be processed which is rotating. The rotational unit includes an enclosing member surrounding the periphery of the substrate to be processed, the enclosing member includes a plurality of guide grooves formed on the bottom surface of the enclosing member and configured to guide the processing liquid, and each of the plurality of guide grooves elongates outwardly from the inner periphery and is arranged in the circumferential direction of the enclosing member.
申请公布号 US8741099(B2) 申请公布日期 2014.06.03
申请号 US201113238241 申请日期 2011.09.21
申请人 Tokyo Electron Limited 发明人 Higashijima Jiro
分类号 C23F1/08 主分类号 C23F1/08
代理机构 代理人
主权项 1. A liquid processing apparatus, comprising: a rotational unit configured to rotate a substrate to be processed while the substrate to be processed is being held horizontally; and a processing liquid supplying unit configured to supply a processing liquid to the bottom surface of the substrate to be processed which is rotating without supplying the processing liquid to the top surface thereof, wherein the rotational unit includes an enclosing member fixed to the rotational unit and configured to rotate with the substrate to be processed while surrounding the periphery of the substrate to be processed, the enclosing member includes a portion extended in a horizontal direction and is configured such that a gap is formed between the inner periphery of the enclosing member and the periphery of the substrate to be processed when the substrate to be processed is disposed on the rotational unit, the enclosing member includes a plurality of guide grooves formed on the bottom surface of the portion extended in the horizontal direction and configured to draw out the processing liquid being entered into the gap outwardly by a capillary action to prevent the processing liquid from going around and flowing onto the top surface of the substrate to be processed, and each of the plurality of guide grooves is configured to elongate outwardly from the inner periphery of the portion extended in the horizontal direction and is arranged with an interval from each other in the circumferential direction of the enclosing member.
地址 Tokyo JP