Method and apparatus for detethering mesoscale, microscale, and nanoscale components and devices

摘要

A method for forming an electronic device includes designing a tether having first and second ends; selecting an attachment point on the electronic device; attaching the first end of the tether to the attachment point, the electronic device being encapsulated in a cell; selecting an anchor point; attaching the second end of the tether to the anchor point; determining fracture condition at which the first end of the tether detaches from the attachment point; agitating the cell at the fracture conditions so as to detach the first end of the tether from the attachment point; and separating the electronic device from the cell. Also provided is a method for designing a plurality of electronic devices, wherein each of the electronic devices is encapsulated in a cell of a wafer, die or other holder and wherein the fracture conditions are the same for a group of the electronic devices.

主权项

1. A method for forming an electronic device, comprising:
designing a tether, wherein the tether includes a first end and a second end; selecting an attachment point on the electronic device; attaching the first end of the tether to the attachment point, wherein the electronic device is encapsulated in a cell; selecting an anchor point; attaching the second end of the tether to the anchor point; determining fracture conditions at which the first end of the tether detaches from the attachment point; agitating the cell at the fracture conditions so as to detach the first end of the tether from the attachment point; and separating the electronic device from the cell.