发明名称 |
VIBRATION CONTROL MASS BODY |
摘要 |
Provided is a vibration control mass body, as a mass body used for controlling with a high accuracy a vibration associated with high-speed movement of a movable body such as a stage, which is large-sized and to which a complicated shape can be imparted. The vibration control mass body (100) includes a plurality of platy members (10, 20). The plurality of members (10, 20) are respectively made of a tungsten alloy. The tungsten alloy contains, as a chief ingredient, tungsten of greater than or equal to 80 % by mass and less than or equal to 99 % by mass. The vibration control mass body (100) is used in a staging unit having a movable body in order to control a vibration associated with movement of the movable body. |
申请公布号 |
CA2631351(C) |
申请公布日期 |
2014.06.03 |
申请号 |
CA20062631351 |
申请日期 |
2006.11.30 |
申请人 |
A.L.M.T. CORP. |
发明人 |
UMEMOTO, SATOSHI;KIKUHARA, SHINJI;INOUE, HITOSHI;UENISHI, NOBORU |
分类号 |
F16F15/02;C22C27/04;H01L21/027 |
主分类号 |
F16F15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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