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1. An inspection apparatus, comprising:
beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles, wherein the primary optical system comprises a photoelectron generator having a photoelectronic surface, and a base material of the photoelectronic surface is made of material with a higher thermal conductivity than a thermal conductivity of quartz.
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