发明名称 |
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object |
摘要 |
A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are presented. |
申请公布号 |
US8743344(B2) |
申请公布日期 |
2014.06.03 |
申请号 |
US20090470773 |
申请日期 |
2009.05.22 |
申请人 |
ASML Netherlands B.V. |
发明人 |
Butler Hans;Van Duijnhoven Martinus;Geerke Johan Hendrik;De Pee Joost;De Hoon Cornelius Adrianus Lambertus |
分类号 |
G03B27/32 |
主分类号 |
G03B27/32 |
代理机构 |
|
代理人 |
|
主权项 |
1. A control system configured to control a position of a cable bundle holder arranged to hold a cable bundle, one end of the cable bundle being fixed to a first object and another end of the cable bundle being fixed to a second object, at a location between the first and second objects, the control system comprising:
a sensor configured to measure a position quantity of the second object relative to the cable bundle holder, wherein the sensor is entirely attached to the cable bundle holder; an actuator configured to actuate the cable bundle holder; and a controller configured to provide a control signal to the actuator based on the position quantity measured by the sensor.
|
地址 |
Veldhoven NL |