Liquid crystal display device and manufacturing method for same

摘要

The present invention provides a liquid crystal display device having gate wires and source/drain wires with a multilayer structure made of the same material which can be manufactured at low cost, as well as a manufacturing method for the same. In accordance with the manufacturing method, a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant, and the concentration of hydrofluoric acid in the etchant is different between the etchant for the gate wires and that for the source/drain wires.

主权项

1. A manufacturing method for a liquid crystal display device having gate wires and source/drain wires, each with a multilayer structure and made of the same material, characterized in that
a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant where the concentration of hydrofluoric acid in the etchant is different for the etchant for the gate wires and the etchant for the source/drain wires, and further characterized in that titanium, aluminum or an alloy thereof and titanium are layered in sequence in the multilayer structure.