发明名称 Layout designs with via routing structures
摘要 An approach for providing layout designs with via routing structures is disclosed. Embodiments include: providing a gate structure and a diffusion contact on a substrate; providing a gate contact on the gate structure; providing a metal routing structure that does not overlie a portion of the gate contact, the diffusion contact, or a combination thereof; and providing a via routing structure over the portion and under a part of the metal routing structure to couple the gate contact, the diffusion contact, or a combination thereof to the metal routing structure.
申请公布号 US8741763(B2) 申请公布日期 2014.06.03
申请号 US201213465129 申请日期 2012.05.07
申请人 GLOBALFOUNDRIES Inc. 发明人 Ma Yuansheng;Kye Jongwook;Levinson Harry;Yoshida Hidekazu;Rashed Mahbub
分类号 H01L21/44;H01L23/528 主分类号 H01L21/44
代理机构 代理人
主权项 1. A method comprising: providing a gate structure and a diffusion contact on a substrate; providing a gate contact on the gate structure; providing a metal routing structure that does not overlie a portion of the gate contact, the diffusion contact, or a combination thereof; and providing a via routing structure over the portion and under a part of the metal routing structure to couple the gate contact, the diffusion contact, or a combination thereof to the metal routing structure, wherein the diffusion contact is provided in a diffusion gap region in the substrate.
地址 Grand Cayman KY