Micromachined inertial sensor devices

摘要

A micromachined inertial sensor with a single proof-mass for measuring 6-degree-of-motions. The single proof-mass includes a frame, an x-axis proof mass section attached to the frame by a first flexure, and a y-axis proof mass section attached to the frame by a second flexure. The single proof-mass is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.

主权项

1. A sensor for measuring a motion thereof, comprising:
a frame; a first planar proof mass section attached to the frame by a first flexure; a second planar proof mass section attached to the frame by a second flexure; and an anchor secured to a wafer disposed beneath the first planar proof mass section and the second planar proof mass section, wherein the frame, the first planar proof mass section, and the second planar proof mass section are formed in a micromachined layer and are adapted to measure angular rates about three axes and linear accelerations about the three axes, and wherein the first planar proof mass section and the second planar proof mass section are configured to be driven, in phase, about the anchor.