发明名称 Improved bonding surfaces for direct bonding of semiconductor structures
摘要 An improved joint surface used for directly jointing semiconductor structures. A method for directly jointing a first semiconductor structure to a second semiconductor structure comprises the following steps: at least one device structure of the first semiconductor structure is directly jointed to at least one device structure of the second semiconductor structure in a conductive material-to-conductive material direct jointing process. In some embodiments, before the jointing process, the at least one device structure of the first semiconductor structure can be allowed to protrude at a distance so as to exceed adjacent dielectric material on the first semiconductor structure. In some embodiments, one or more of a plurality of device structures can include a plurality of overall protrusions extending from a basic structure. These methods are used to manufacture a jointed semiconductor structure.
申请公布号 KR101401584(B1) 申请公布日期 2014.06.02
申请号 KR20120078214 申请日期 2012.07.18
申请人 发明人
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
代理机构 代理人
主权项
地址