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发明名称
用于二氧化矽及氮化矽层之可印刷蚀刻介质
摘要
申请公布号
TWI439434
申请公布日期
2014.06.01
申请号
TW095125856
申请日期
2006.07.14
申请人
马克专利公司 德国
发明人
华纳 史塔克姆;爱尔明 库贝尔贝克;中野渡旬
分类号
C03C15/00
主分类号
C03C15/00
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
德国
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