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发明名称
薄膜形成用原料及薄膜之制造方法
摘要
申请公布号
TWI439564
申请公布日期
2014.06.01
申请号
TW096125152
申请日期
2007.07.11
申请人
艾迪科股份有限公司 日本
发明人
山田直树;芳仲笃也;田中伸一
分类号
C23C16/40
主分类号
C23C16/40
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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