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发明名称
扩晶环夹掣装置
摘要
申请公布号
TWM479513
申请公布日期
2014.06.01
申请号
TW103201900
申请日期
2014.01.29
申请人
刘盈坤 南投县中寮乡永平路349之5号
发明人
刘盈坤
分类号
H01L21/683
主分类号
H01L21/683
代理机构
代理人
田国健 台中市南区忠明南路789号23楼
主权项
地址
南投县中寮乡永平路349之5号
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