用于将容室中的容器回火的装置,申请号TW102214269-传众专利搜索

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发明名称	用于将容室中的容器回火的装置
摘要
申请公布号	TWM479508	申请公布日期	2014.06.01
申请号	TW102214269	申请日期	2013.07.30
申请人	道克伟勒公司德国	发明人	菲比格　克劳斯　迪耶特
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人	阎启泰台北市中山区长安东路2段112号9楼;林景郁台北市中山区长安东路2段112号9楼
主权项
地址	德国

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