| 摘要 |
An IPA drying apparatus of a touch screen panel includes a drying process chamber forming a space in which IPA steam is supplied to a film in a cassette; a carrying and holding device for carrying the cassette into or out of the drying process chamber between the drying process chamber and an outside and for holding the cassette inside the drying process chamber; and a cassette carrying lift provided at a carrying position higher than the ground surface in order to carry the cassette on a vehicle into the drying process chamber so that the transferring and holding device can exactly grip the cassette outside the drying process chamber, and the cassette carrying lift includes a vehicle guide part to guide the carrying of the vehicle at a right position under the vehicle, a carrying position sensor for detecting the carrying of the vehicle at the right position, a vertical lift part for receiving a signal from the carrying position sensor to grip a portion of the cassette and lift the cassette from the vehicle, a cassette seating part for horizontally moving from the right position to move to the lower portion of the cassette and returning to an original position in the state that the cassette is seated on the cassette seating part if the vertical lift part is moved downward and having at least three socket-protrusion pair structures so that the top surface of the cassette seating part is matched with the lower portion of the cassette in the arrangement of the original position, and a central processing unit for adjusting the operations of the vertical lift parts and the cassette seating part according to the signal of the carrying position sensor.According to the present invention, when an IPA drying process is performed, a work of carrying a transparent conductive film cassette introduced for the process to the drying process chamber can be exactly aligned at an exact position and performed, so that the failure factor resulting from the alignment failure can be prevented. |
