发明名称 PAPER-SUBSTRATE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention relates to a paper-substrate memory device and a method of manufacturing the same. In the present invention, a memory device is manufactured by using paper, which is coated with a heat-resistance material such as silicon or paper made of pulp, as a substrate. In the present invention, a metal line layer such as a gate electrode is formed on a paper substrate using a vacuum deposition method, and a ferroelectric layer made of a ferroelectric material and a channel formation layer are stacked on the metal line layer.
申请公布号 KR20140066115(A) 申请公布日期 2014.05.30
申请号 KR20130142563 申请日期 2013.11.22
申请人 UNIVERSITY OF SEOUL INDUSTRY COOPERATION FOUNDATION. 发明人 PARK, BYUNG EUN
分类号 H01L21/84;H01L21/8247 主分类号 H01L21/84
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