SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL PRE-CHARACTERIZATION OF A SAMPLE FOR FAST AND NON-DESTRUCTIVE ON SAMPLE NAVIGATION DURING NANOPROBING

摘要

A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three- dimensional coordinates.