| 摘要 |
<p>A method for manufacturing a contact probe (10) includes: a lithography step of obtaining a resin mold by forming a pattern for the contact probe (10), a pattern for a tie bar (20) in a shape of a frame therearound, and a pattern for a coupling portion (30) coupling these two patterns, in a resist formed on a conductive substrate, by lithography; an electroforming step of forming a layer made of a metal material on the resin mold by electroforming to form a metal structure (1) in which the contact probe (10) is integral with the tie bar (20) at the coupling portion (30); a removal step of removing the resin mold and the conductive substrate; a plating step of forming a plating layer on a surface of the metal structure (1) by electroplating after the removal step; and a separation step of separating the contact probe (10) from the metal structure (1) after the plating step. Thereby, a method for manufacturing the contact probe (10) capable of readily forming a plating layer with a uniform thickness on its surface can be provided.</p> |
