发明名称 COPPER PLATING BATH COMPOSITION
摘要 The present invention relates to aqueous acidic plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises copper ions, at least one acid and an ureylene polymer comprising amino residues on both termini and which is free of organically bound halogen. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
申请公布号 WO2014079737(A2) 申请公布日期 2014.05.30
申请号 WO2013EP73629 申请日期 2013.11.12
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 BRUNNER, HEIKO;ROELFS, BERND;WITCZAK, AGNIESZKA;KOHLMANN, LARS;MANN, OLIVIER;OHDE, CHRISTIAN;BANGERTER, TIMO;FERRO, ANGELO;KIRBS, ANDREAS;SCHMÖKEL, ANDRE;ROHDE, DIRK;ACKERMANN, STEFANIE
分类号 C25D3/38;C25D3/58 主分类号 C25D3/38
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