发明名称 HEAT TREATMENT APPARATUS
摘要 <p>A heat treatment apparatus is disclosed. The heat treatment apparatus according to the present invention includes a main body which has a chamber and a unit of detecting the leakage of a gas between the main body and a door. If the leakage of a gas is detected, the heat treatment apparatus is stopped and repaired. Therefore, safety accidents due to the leakage of a gas can be prevented.</p>
申请公布号 KR101399663(B1) 申请公布日期 2014.05.30
申请号 KR20120110057 申请日期 2012.10.04
申请人 发明人
分类号 H01L31/042;H01L31/18 主分类号 H01L31/042
代理机构 代理人
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