DEVELOPABLE BOTTOM ANTI-REFLECTIVE COATING

摘要

The present invention provides a cross-linking agent capable of preventing formation of scum from a bottom anti-reflective coating, and also provides a composition for forming a bottom anti-reflection coating containing the agent. The cross-linking agent is a nitrogen- containing aromatic compound having at least one vinyloxy group or N-methoxymethylamide group, and the composition contains the cross-linking agent. Each of E1 to E3 is independently selected from the group consisting of carbon and nitrogen atoms, provided that at least one of them is a nitrogen atom; each of F1 to F3 is independently selected from the group consisting of oxygen and sulfur atoms; each of G1 to G3 is independently selected from the group consisting of a vinyloxy group, a N-methoxymethylamide group and a hydrogen atom, provided that at least one of them is a vinyloxy group or a N- methoxymethylamide group; and each of p1 to p3 is independently selected from integer including 0 provided that at least any two of them are at least 1 or above 1.