| 摘要 |
A cold trap using a thermoelectric module according to the present invention can effectively cool a partial area of a cold housing (10) by using a thermoelectric module (70), which is utilizing Peltier effect, and to heat the cold housing (10) cooled by a cooling module (50) by using a sub-thermoelectric module (170) so that a gas cooling area can be minimized, and precise temperature control can be implemented by using thermoelectric module (70) or the sub-thermoelectric module (170). |
