发明名称 POLISHING PAD
摘要 <p>The purpose of the present invention is to provide a polishing pad, which hardly generates scratches on a surface of a subject to be polished, and which has a longer service-life. This polishing pad is characterized in that: the polishing pad is provided with a polishing layer having a polishing region and a light transmissive region; the polishing region has a groove on the surface thereof; the surface of the light transmissive region is recessed from the surface of the polishing region; and the recessed quantity of the light transmissive region is 30-100 % of the depth of the groove.</p>
申请公布号 WO2014080729(A1) 申请公布日期 2014.05.30
申请号 WO2013JP79245 申请日期 2013.10.29
申请人 TOYO TIRE & RUBBER CO., LTD. 发明人 NAKAMURA,KENJI
分类号 B24B37/013;B24B37/11;B24B37/22;H01L21/304 主分类号 B24B37/013
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