发明名称 PATTERNING METHOD OF GRAPHENE
摘要 <p>The present invention relates to a method for patterning graphene, and more specifically, to a method for patterning graphene comprising the steps of forming an oxide layer on a substrate; forming metal patterns on the oxide layer; transferring graphene onto the oxide layer and the metal patterns; and forming graphene patterns by removing graphene from the metal patterns by applying heat to the graphene and vaporizing the graphene.</p>
申请公布号 KR101400723(B1) 申请公布日期 2014.05.30
申请号 KR20130021855 申请日期 2013.02.28
申请人 POSTECH ACADEMY-INDUSTRY FOUNDATION;RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY 发明人 YEOM, GEUN YOUNG;LHM, KYU WOOK;LIM, JONG TAE;LEE, KYOUNG JAE;JEONG, SUK MIN;KANG, TAE HEE;PARK, JIN WOO;OH, JONG SIK;KIM, SUNG HEE;YANG, MI HYUN
分类号 G03F7/00;B29C59/02;H01L21/027 主分类号 G03F7/00
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