发明名称 PROCESSING DATA MANAGING SYSTEM, PROCESSING SYSTEM FOR MAGNETIC DISK MANUFACTURING APPARATUS, AND DATA MANAGING METHOD FOR MAGNETIC DISK MANUFACTURING APPARATUS
摘要 <p>A PROCESSING DATA MANAGING SYSTEM INCLUDES: A PROCESSING DEVICE (11) (SUCH AS A SPUTTERING DEVICE FOR MANUFACTURING A MAGNETIC DISC) FOR REPEATING THE SAME PROCESS FOR EACH CYCLE; A SAMPLING UNIT (30) FOR COLLECTING RAW DATA ON A PROCESSING CONDITION IN THE PROCESSING DEVICE (SUCH AS A DISCHARGE CONDITION); A CALCULATION UNIT (100) FOR RECEIVING THE RAW DATA, CALCULATING THE RAW DATA ACCORDING TO A PREDETERMINED RULE, AND PROCESSING IT AS SUMMARY DATA EXPRESSING A CHARACTERISTIC POINT FOR EACH CYCLE (CHARACTERISTIC VALUE: FOR EXAMPLE, AVERAGE VALUE, MAXIMUM VALUE, MINIMUM VALUE, STANDARD DEVIATION, DISCHARGE TIME, AND THE LIKE); A DATA STORAGE UNIT (40) FOR STORING THE PROCESSED SUMMARY DATA IN STORAGE MEANS, AND A DISPLAY/OUTPUT UNIT (50) FOR CHART-DISPLAYING THE SUMMARY DATA STORED IN THE STORAGE MEANS. (FIG. 1)</p>
申请公布号 MY151420(A) 申请公布日期 2014.05.30
申请号 MY2008PI03908 申请日期 2007.03.30
申请人 HOYA CORPORATION 发明人 KOBAYASHI, TAKUMI
分类号 G05B19/418;C23C14/00;C23C14/22;C23C14/34;C23C14/54;G05B23/02;G11B5/851 主分类号 G05B19/418
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