摘要 |
<p>A PROCESSING DATA MANAGING SYSTEM INCLUDES: A PROCESSING DEVICE (11) (SUCH AS A SPUTTERING DEVICE FOR MANUFACTURING A MAGNETIC DISC) FOR REPEATING THE SAME PROCESS FOR EACH CYCLE; A SAMPLING UNIT (30) FOR COLLECTING RAW DATA ON A PROCESSING CONDITION IN THE PROCESSING DEVICE (SUCH AS A DISCHARGE CONDITION); A CALCULATION UNIT (100) FOR RECEIVING THE RAW DATA, CALCULATING THE RAW DATA ACCORDING TO A PREDETERMINED RULE, AND PROCESSING IT AS SUMMARY DATA EXPRESSING A CHARACTERISTIC POINT FOR EACH CYCLE (CHARACTERISTIC VALUE: FOR EXAMPLE, AVERAGE VALUE, MAXIMUM VALUE, MINIMUM VALUE, STANDARD DEVIATION, DISCHARGE TIME, AND THE LIKE); A DATA STORAGE UNIT (40) FOR STORING THE PROCESSED SUMMARY DATA IN STORAGE MEANS, AND A DISPLAY/OUTPUT UNIT (50) FOR CHART-DISPLAYING THE SUMMARY DATA STORED IN THE STORAGE MEANS. (FIG. 1)</p> |