发明名称 IMPRINT MOLD MANUFACTURING METHOD
摘要 Provided is an imprint mold manufacturing method capable of preventing accumulation of transfer resin on the transfer roll. The present invention provides an imprint mold manufacturing method provided with: a resin coating process for coating a photo- or heat-curable resin composition on a pattern transfer mold that has a detailed relief pattern; and a transfer process for forming a reversed pattern of the relief pattern on the entire circumference of the transfer roll by transferring the resin composition to the entire circumference of a cylindrical transfer roll and curing the resin composition.
申请公布号 WO2014080858(A1) 申请公布日期 2014.05.30
申请号 WO2013JP81013 申请日期 2013.11.18
申请人 SOKEN CHEMICAL & ENGINEERING CO., LTD. 发明人 MIZUKAMI, YUTAKA
分类号 B29C59/04;B29C33/38;H01L21/027 主分类号 B29C59/04
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