发明名称 |
IMPRINT MOLD MANUFACTURING METHOD |
摘要 |
Provided is an imprint mold manufacturing method capable of preventing accumulation of transfer resin on the transfer roll. The present invention provides an imprint mold manufacturing method provided with: a resin coating process for coating a photo- or heat-curable resin composition on a pattern transfer mold that has a detailed relief pattern; and a transfer process for forming a reversed pattern of the relief pattern on the entire circumference of the transfer roll by transferring the resin composition to the entire circumference of a cylindrical transfer roll and curing the resin composition. |
申请公布号 |
WO2014080858(A1) |
申请公布日期 |
2014.05.30 |
申请号 |
WO2013JP81013 |
申请日期 |
2013.11.18 |
申请人 |
SOKEN CHEMICAL & ENGINEERING CO., LTD. |
发明人 |
MIZUKAMI, YUTAKA |
分类号 |
B29C59/04;B29C33/38;H01L21/027 |
主分类号 |
B29C59/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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