SUBSTRATE PROCESSING LINE AND SUBSTRATE PROCESSING METHOD

摘要

A substrate processing line includes a plurality of processing devices having a conveyer to support a substrate while conveying the substrate in a substrate transfer direction. One processing device has a movable conveyer movable in a direction perpendicular to the substrate transfer direction as the above-mentioned conveyor. One position detection unit and another position detection unit are provided in the one processing device and another processing device to detect the positions of the substrate. A control unit controls the movement of the movable conveyer by a determination result of an execution status of a substrate transferring operation to transfer the substrate between the movable conveyer of the one processing device and the movable conveyer of the another processing unit based on the position detection results of the one position detection unit and another position detection unit.