发明名称 GLASS SUBSTRATE CLEANING METHOD
摘要 <p>A method for cleaning a glass substrate after polishing, wherein a decrease in adhesion performance of a resin BM film formed on the cleaned glass substrate surface is suppressed and peeling of the resin BM film is prevented. A glass substrate cleaning method, characterized in that a glass substrate polished using a polishing agent containing cerium oxide particles is washed using an acidic aqueous cleaning liquid containing an organic acid and then washed using an alkaline aqueous cleaning liquid containing a base.</p>
申请公布号 WO2014080917(A1) 申请公布日期 2014.05.30
申请号 WO2013JP81203 申请日期 2013.11.19
申请人 ASAHI GLASS COMPANY, LIMITED;PARKER CORPORATION 发明人 ENOMOTO, HISAO;SAHARA, KOJI;ISHIKAWA, CHIAKI;KIYAMA, ATSUSHI;MAEYANAGI, YOSHITAKA;TAKENAKA, ATSUYOSHI;KOBAYASHI, DAISUKE;TAKAHASHI, HIDEYUKI;NAKAJIMA, YOUJI
分类号 C03C23/00;C11D1/44;C11D3/20;C11D3/34;C11D3/36;G02F1/1333 主分类号 C03C23/00
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