发明名称 SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME
摘要 A semiconductor device includes an insulating interlayer over a substrate in a first region, the insulating layer including contact holes exposing a portion of a surface of the substrate, and contact plugs in the contact holes. The contact plugs include a stacked structure of a first barrier metal layer pattern and a first metal layer pattern. The semiconductor device also includes second metal layer patterns directly contacting with the contact plugs and an upper surface of the insulating interlayer. The second metal layer pattern consists is a metal material layer.
申请公布号 US2014145268(A1) 申请公布日期 2014.05.29
申请号 US201314017502 申请日期 2013.09.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK JE-MIN;KIM DAE-IK
分类号 H01L29/78;H01L29/66 主分类号 H01L29/78
代理机构 代理人
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