| 摘要 |
A MEMS vibration element 100 includes a substrate 1, a fixing part 23 provided on a principal surface of the substrate 1, a supporting part 22 extending from the fixing part 23, and an upper electrode 21 (a vibration body) supported by the supporting part 22, isolated from the substrate 1. The upper electrode 21 includes a cut section extending from the peripheral portion of the upper electrode 21 toward the central portion of the upper electrode 21, the cut section 30 exposing a side surface portion of the upper electrode 21. The upper electrode 21 includes a joining part provided at a side surface portion 31 oriented in a direction from the central portion toward the peripheral portion, among the side surface portion exposed by the cut section 30, and the joining part is connected to the supporting part 22. |
