发明名称 |
Method for Determining Carrier Concentrations in Semiconductor Fins |
摘要 |
A method includes probing at least one semiconductor fin using a four-point probe head, with four probe pins of the four-point probe head contacting the at least one semiconductor fin. A resistance of the at least one semiconductor fin is calculated. A carrier concentration of the semiconductor fin is calculated from the resistance. |
申请公布号 |
US2014147943(A1) |
申请公布日期 |
2014.05.29 |
申请号 |
US201213689262 |
申请日期 |
2012.11.29 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, L;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
WANN CLEMENT HSINGJEN;OKUNO YASUTOSHI;YEH LING-YEN;SHIH CHI-YUAN;SHAO YUAN-FU;TSAI WEI-CHUN |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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