| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device that can improve shock resistance to an external shock and also improve performance by reduction in frequency variation accompanying secular change in tensile stress and so on.SOLUTION: A physical quantity sensor 1 includes a sensor substrate 10 having a functional part 11 and a support part 12 where the functional part 11 is fixed, and a package 20 which has a smaller coefficient of thermal expansion than the sensor substrate 10 and includes a recessed package base 21 for housing the sensor substrate 10, and the support part 12 of the sensor substrate 10 has support arms 12a, 12b and 12c, 12d as beam-like flexible parts at both ends, tips of the support arms 12a, 12b and 12c, 12d being fixed to the package base 21 in contact with mutually opposite inner walls 21a, 21b of the recessed part of the package base 21 of the package 20 respectively. |
