FLUID HANDLING STRUCTURE AND METHOD, AND LITHOGRAPHY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide fluid handling structure where size and constitution of a fluid extraction opening are designated in order to reduce vibration transmitted to the fluid handling structure as result of two-phase extraction.SOLUTION: The area of respective fluid extraction openings, the total area of all fluid extraction openings, and/or an interval between adjacent fluid extraction openings can be controlled. When vibration decreases, precision in exposure is improved.