发明名称 |
SHEET APPLICATION DEVICE AND APPLICATION METHOD AND PRESSING DEVICE AND PRESSING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a pressing device etc. capable of applying a pressing force having high uniformity to a pressing object.SOLUTION: A pressing device 70 comprises: pressing means 20 which has a first end part and a second end part and presses a pressing object AS; holding means 30 which holds the first end part 22a and the second end part 22b; first correcting means 40 which is positioned between the first end part 22a and the second end part 22b and prevents the pressing means 20 from being deformed by a reaction force from the pressing object side AS; and second correcting means 50 which is positioned between the first end part 22a and the second end part 22a and prevents the pressing means 20 from being deformed by its self weight. |
申请公布号 |
JP2014099502(A) |
申请公布日期 |
2014.05.29 |
申请号 |
JP20120250432 |
申请日期 |
2012.11.14 |
申请人 |
LINTEC CORP |
发明人 |
SUGISHITA YOSHIAKI |
分类号 |
H01L21/683;H01L21/301;H01L21/304 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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