TRANSPARENT CONDUCTIVE FILM AND MANUFACTURING METHOD THEREOF

摘要

Provided is a transparent conductive film and a manufacturing method for the same. The transparent conductive film includes a lamination structure in which a transparent film, a high refraction layer, a low refraction layer, and a conductive layer contains indium-tin complex oxide containing tin atom of 3-10 wt%; and has a hall mobility of 5-15 cm^2/V·S and a carrier density of 9.0X10^20-2X10^21/cm^3. The manufacturing method for a transparent conductive film includes a step of forming the high refraction layer and the low refraction layer on the transparent film using a wet process; a step of forming the conductive layer containing the indium-tin composite oxide containing tin atoms of 3-10 wt% on the formed low refraction layer; and a step of thermal-processing and crystallizing the formed conductive layer to include the carrier density of 9.0X10^20-2X10^21/cm^3 and the hall mobility of 5-15 cm^2/V·S.