| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and lightweight substrate transport hand of which the size can be changed in accordance with the size of a substrate, and to provided a substrate transport method.SOLUTION: In a substrate transport hand 10, when substrate support members 18, 20 are moved in parallel in a horizontal direction so as to get closer to each other by a drive section 22, substrate support members 24, 26 are moved in parallel in a horizontal direction via parallel link members 28, 28... so as to get closer to each other, while being operatively connected with the movement of the substrate support members 18, 20. When the substrate support members 18, 20 are moved in parallel in the horizontal direction so as to be separated away from each other by the drive section 22 inversely to the above movement, the substrate support members 24, 26 are moved in parallel in the horizontal direction via the parallel link members 28, 28... so as to be separated away from each other, while being operatively connected with the movement of the substrate support members 18, 20. In the substrate transport hand 10, the size of a space 58 defined by the substrate support members 18, 20, 24, 26 can be adjusted stepless from maximum size to minimum size. |
