SEMICONDUCTOR ELEMENT TEST DEVICE AND TEST METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element test device and a test method therefor.SOLUTION: A semiconductor element test device of the present invention includes: a temperature detection unit that detects the temperature of a semiconductor element and generates a detection temperature; a control unit that compares the detection temperature with a predetermined control temperature, generates a comparison result, and determines according to the comparison result whether to cool the semiconductor element; and a cooling unit that cools the semiconductor element by the control of the control unit. If the detection temperature is out of the operating temperature range of the semiconductor element, the control unit can redefine the control temperature.