| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a mirror device or the like that suppresses a load to a device at bonding potentially serving as a factor for worsening a yield rate to be comparatively low, and in addition, suppresses an influence of height variation.SOLUTION: A manufacturing method of a mirror device includes: a step of forming, on a first substrate S1, an actuator configured with a support part 3, a movable part 4, an elastic body 5 that supports the movable part at the support part, and a bonding part 9 on the movable part; and a step of forming a bonding bump on an elastic body layer 2 of a second substrate S2. The bonding part 9 of the first substrate and the bonding bump 11 of the second substrate are arranged opposite to each other and bonded, and a reflection part 2M is formed on a side opposite to the side where the bonding bump of the elastic body layer is formed. |
