| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum pressure adjusting system for continuously performing detection of abnormality which may lapse into a situation where an exhaust speed does not reach a required exhaust speed even when a valve aperture of a vacuum pressure regulating valve reaches a fully opened state by monitoring a difference between a present pressure value and a target pressure value in a vacuum chamber by a controller.SOLUTION: A valve main body part 1 for opening/closing a valve seat 14 by a valve member 15 includes: a fluid pressure driving part 2 including a pressure receiving member (piston 16) for opening/closing the valve member; a valve opening control part 3 for setting an aperture of the valve member; an electromagnetic valve device 6 for feeding/discharging a pilot fluid to/from the fluid pressure driving part; and a controller for controlling the aperture of the valve member. The controller has a function for controlling the aperture of the valve member by position control of the pressure receiving member so that a vacuum chamber 7 reaches a predetermined target pressure and a function for monitoring a difference between a present pressure value and a target pressure value in the vacuum chamber, which is obtained by a pressure sensor 70, and when the difference deviates from a set allowable range, informing of the deviation as abnormality.</p> |
