| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a calibration apparatus for calibrating an optical device having a scanning member, with high accuracy.SOLUTION: A calibration apparatus calibrates an optical device which scans light on an object by rotating a scanning member. The calibration apparatus includes: a target member including an irradiation region irradiated with light from the scanning member; an acquisition unit which acquires a light quantity of light reflected by the irradiation region; and a processing unit which performs processing for calculating a calibration value required for calibrating a rotation angle of the scanning member. The irradiation region is configured to have a non-planer surface so that the light quantity acquired by the acquisition unit changes according to a light irradiation position. The processing unit performs a first process for acquiring the light quantity of light reflected by the irradiation region by the acquisition unit in a state in which the scanning member is rotated so that a reference position of the irradiation region is irradiated with the light, a second process for calculating an actual irradiation position where the irradiation region is actually irradiated with the light in the first process based on the light quantity acquired in the first process, and a third process for calculating a calibration value from the actual irradiation position calculated in the second process and the reference position of the region.</p> |
