发明名称 Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EUV Light Source
摘要 A device is described herein which may comprise an optical amplifier having a gain band including wavelengthsλ1 andλ2, withλ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelengthλ1; a main pulse seed laser generating a laser output having wavelength,λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
申请公布号 US2014146387(A1) 申请公布日期 2014.05.29
申请号 US201414171492 申请日期 2014.02.03
申请人 CYMER, LLC 发明人 HOU KAI-CHUNG;SANDSTROM RICHARD L.;PARTLO WILLIAM N.;BROWN DANIEL J.W.;FOMENKOV IGOR V.
分类号 H01S3/00;H01S3/223 主分类号 H01S3/00
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