发明名称 MASK AND METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUTOR DEVICE
摘要 A mask includes a substrate, an effective pixel formation region and a reference pattern formation region. A pixel pattern for forming a pixel component that constitutes a pixel is arranged in the effective pixel formation region. A reference pattern for indicating a reference position where pixel pattern should be arranged in the effective pixel formation region is arranged in the reference pattern formation region. Pixel pattern is arranged to be displaced from the reference position toward a center side of the effective pixel formation region.
申请公布号 US2014145192(A1) 申请公布日期 2014.05.29
申请号 US201314079709 申请日期 2013.11.14
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MOMONO HIROYUKI
分类号 H01L27/02;G06F17/50;H01L21/66 主分类号 H01L27/02
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