发明名称 ADHESIVE METAL NITRIDE ON GLASS AND RELATED METHODS
摘要 This disclosure provides systems, methods and apparatus for an adhesive metal nitride layer on glass. In one aspect, a glass substrate having a surface is provided. A via with a depth to width aspect ratio of 5 to 1 or greater extends at least partially through the glass substrate. An adhesive metal nitride layer is disposed on the surface of the glass substrate and on one or more interior surfaces of the via. The adhesive metal nitride layer includes at least one of titanium nitride and tantalum nitride.
申请公布号 US2014144681(A1) 申请公布日期 2014.05.29
申请号 US201213686620 申请日期 2012.11.27
申请人 QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 PUSHPARAJ VICTOR LOUIS AROCKIARAJ;SHENOY RAVINDRA V.;LASITER JON BRADLEY;LAI KWAN-YU;KIDWELL DONALD WILLIAM;LONDERGAN ANA RANGELOVA
分类号 H05K1/03;B32B3/26;B32B3/30;B32B7/12;C23C16/02;C23C28/00;H05K1/09;H05K1/16 主分类号 H05K1/03
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