| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the number of ON/OFF valves necessary for a supply flow rate TQ of fluid to be supplied to a flow channel.SOLUTION: Respective ON/OFF valves V1 to V3 are respectively connected to branch pipes L1 to L3 connected in parallel in a flow channel L in which fluid is allowed to flow. Flow rates of the passable fluid during the ON time of the ON/OFF valves V1 to V3 are made respectively different, and when a flow rate of the passable fluid during the ON time of the ON/OFF valve with the smallest flow rate of the passable fluid during the ON time out of the ON/OFF valves V1 to V3 is set to Q1 and n is defined as the arrangement order of the flow rates of the passable fluid during the ON time of the ON/OFF valves, a flow rate Qn of the passable fluid during the ON time of the ON/OFF valves V1 to V3 is defined as Qn=2*Q1. A control part 1A determines combinations of open/close control of the ON/OFF valves V1 to V3 on the basis of a supply flow rate TQ (set flow rate TQsp) of the fluid to be supplied to the flow channel and the flow rate Qn of the passable fluid during the ON of the ON/OFF valves V1 to V3.</p> |
