| 摘要 |
<p>PROBLEM TO BE SOLVED: To hold support members by a plurality of holding members with a common movement operation in the case in which a plurality of substrates are used.SOLUTION: A substrate support device 10 includes: a plurality of case bodies 22 in which a plurality of support pins 24 are arranged and convex parts 36 and concave parts 38 are formed; and a plurality of holding plates 26 which are provided in the case bodies 22 and in which connection parts 44 and connected parts 46 are formed. The connection part 44 of one holding plate 26 is fit into the connected part 46 of another holding plate 26. The plurality of holding plates 26 integrally move and hold the plurality of support pins 24 in a projection state of the plurality of support pins 24, thereby holding the plurality of support pins 24 with a common movement operation.</p> |
