发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT WAFER AND METHOD FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT CHIP AND SEMICONDUCTOR INTEGRATED CIRCUIT WAFER |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit wafer capable of reducing bonding failures and improving connection reliability without leaving a scar on a bonding pad.SOLUTION: A semiconductor integrated circuit wafer comprises: a semiconductor integrated circuit region 2a; a scribe region 3; a BIST circuit 4 provided in the scribe region; a connection wiring 9 which connects a semiconductor integrated circuit 2 and the BIST circuit 4; a BIST switching signal input pad 7; and a BIST switching circuit 8 driven by a driving signal from the BIST switching signal input pad 7. The BIST switching circuit 8 further comprises: an input/output pad 6 for a semiconductor integrated circuit; a circuit wiring 11 which connects the input/output pad 6 and the semiconductor integrated circuit 2; and a switch element 10 provided in the middle of the circuit wiring 11 and driven by a driving signal from the BIST switching signal input pad 7.</p> |
申请公布号 |
JP2014099630(A) |
申请公布日期 |
2014.05.29 |
申请号 |
JP20130267265 |
申请日期 |
2013.12.25 |
申请人 |
PS4 LUXCO S A R L |
发明人 |
MIYAZAKI MANABU |
分类号 |
H01L21/66;G01R31/28;H01L21/822;H01L27/04 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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