发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT WAFER AND METHOD FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT CHIP AND SEMICONDUCTOR INTEGRATED CIRCUIT WAFER
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit wafer capable of reducing bonding failures and improving connection reliability without leaving a scar on a bonding pad.SOLUTION: A semiconductor integrated circuit wafer comprises: a semiconductor integrated circuit region 2a; a scribe region 3; a BIST circuit 4 provided in the scribe region; a connection wiring 9 which connects a semiconductor integrated circuit 2 and the BIST circuit 4; a BIST switching signal input pad 7; and a BIST switching circuit 8 driven by a driving signal from the BIST switching signal input pad 7. The BIST switching circuit 8 further comprises: an input/output pad 6 for a semiconductor integrated circuit; a circuit wiring 11 which connects the input/output pad 6 and the semiconductor integrated circuit 2; and a switch element 10 provided in the middle of the circuit wiring 11 and driven by a driving signal from the BIST switching signal input pad 7.</p>
申请公布号 JP2014099630(A) 申请公布日期 2014.05.29
申请号 JP20130267265 申请日期 2013.12.25
申请人 PS4 LUXCO S A R L 发明人 MIYAZAKI MANABU
分类号 H01L21/66;G01R31/28;H01L21/822;H01L27/04 主分类号 H01L21/66
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