发明名称 PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME
摘要 Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.
申请公布号 US2014144584(A1) 申请公布日期 2014.05.29
申请号 US201314091605 申请日期 2013.11.27
申请人 SEMES CO., LTD. 发明人 KOO IL GYO;MELIKYAN HARUTYUN;SEONG HYO SEONG;LEE SOOJIN
分类号 H01J37/32 主分类号 H01J37/32
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