摘要 |
<p>According to an embodiment of the invention, a semiconductor device includes a substrate, a second conductive type source region formed in the substrate, a second conductive type drain region formed in the substrate, a first conductive type channel region formed in the substrate, a second conductive type drift region formed between the first conductive type channel region and the second conductive type drain region, an insulator film buried on a surface of the second conductive type drift region, and a gate electrode including an opening between the first conductive type channel region and the insulator film and covering a surface of the substrate from the first conductive type channel region to part of the insulator film via a gate insulator. The second conductive type drift region includes a second portion of the second conductive type drift region formed in the substrate below the opening.</p> |