| 摘要 |
The present invention relates to a substrate loading device for a deposition apparatus which enables alignment of a substrate and a mask and elevation of a substrate holder in which the substrate is being laid. For the substrate loading apparatus for receiving the substrate holder including the mask from an organic material deposition system to load and transfer the substrate to a deposition chamber, the substrate loading device of the present invention comprises: a substrate supporting unit which is performs lifting operation and includes a substrate holder support and transfer unit for supporting and transferring the substrate holder; and a mask cap lifting device which lifts a mask cap provided on the upper side of the substrate holder in a state that the substrate holder is supported by the substrate supporting unit. |
