ACCELERATION SENSOR

摘要

An acceleration sensor according to the present invention includes a mass, a flexible beam which a piezoresistive element consisting of an X-axis resistor, a Y-axis resistor, and a Z-axis resistor is arranged in and is connected to the mass, and a support part which is connected to the flexible beam and supports the flexible beam to float the mass. The piezoresistive element is arranged in a row in the center of the flexible beam′s width in a direction which is vertical to the direction of connecting the support and the mass.