发明名称 USED OIL FILTERING SYSTEM WITH A COOLING DEVICE
摘要 The present invention relates to a used oil filtering system with a cooling device. The used oil filtering system cuts silicon ingot into a standard size, separates polishing materials from used slurry collected from a wafering process for producing silicon wafers, filters the used oil such as cutting oil to be recycled with a used oil filter, detects the temperature of the used oil inserted into the used oil filter, cools the used oil inserted into the used oil filter by inserting cooling water into a jacket type cooling device covering a used oil storage tank when the temperature of the used oil goes up to the cooling start temperature, and reduces the temperature of the used oil filter lower than the cooling start temperature. By using the system of the present invention, while the used oil filter system is working, overheat of the used oil filter can be prevented, so that the used oil filter does not need to be frequently replaced. Therefore, costs for replacing a filter can be minimized as well as replacing time can be minimized. That means a conventional problem of deteriorating the quality of used oil when the used oil filter system stops working while replacing the filter can be solved.
申请公布号 KR20140064263(A) 申请公布日期 2014.05.28
申请号 KR20120131408 申请日期 2012.11.20
申请人 CHEMISIS CO., LTD.;INDUSTRY-ACADEMIC COOPERATION FOUNDATION AT NAMSEOUL UNIV. 发明人 LIM, JU MOOK;KANG, NA HEE
分类号 H01L21/02;H01L21/301 主分类号 H01L21/02
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